Abstract: Grating interferometers highly valued for high resolution, straightforward benchmark, and insensitivity to environmental disturbances have become one of the most mainstream methods for ...
Aspherical Surface Measurement With Multi-Directional Lateral Shearing Phase-Shifting Interferometry
Abstract: Lateral shearing interferometry is an effective method for directly measuring the depth gradient of aspherical surfaces. To address the low phase reconstruction accuracy resulting from the ...
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